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  • Substrate
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      Products Home - Products
    Substrate

     

     

     

    Crystal materials High-purity single crystal99,995%
    Crystal quality  
      2inch 4inch 6inch >6inch
    Diameter 50.8±0.2 100.1±0.1 150±0.3 Customized
    mm
    Thickness 430±15µm 650±20µm 1300±25µm Customized
    Standard Products
    Crystal orientation C- plane (0001) to M-plane (1-100) or A-plane(1 1-2 0) 0.2±0.1° 
    Directional
    Main plane length 16.0±1.0 32.5±1.5 50±1.5 Customized
     
    Positioning edge A-plane (1 1-2 0 ) 0° ± 0.3°
    Primary flat Orientation
    Thickness variation ≤5µm ≤15µm ≤25m  
    Camber ≤8µm ≤20µm ≤20µm  
    Bending ≤10µm ≤20µm ≤30µm  
    Positive status Epi-Polished (Ra< 0.5nm)
    Negative status Fine ground (Ra=0.4 to 1.2 µm),     
    Cleaning Class 100  clean room cleaning, 
    vacuum packaging derived nitrogen
    Note None  cracks, digs, chipping etc.